Technical features
- Imprint mode: roll-to-roll imprint, UV-cure imprint (365 nm UV LED)
- Operation mode: continuous operation with flexible roll materials, single-sided/double-sided alignment/multi-layer alignment, speed 1-30 m/min
- Alignment accuracy: double-sided alignment precision 20-100 um
- Imprint structure: 50 nm - 50 um
- Imprint area: wide 500 mm (FlexAligner-R500); wide 1400 mm (FlexAligner-R1400)
- Sub-mold type: metal mold
- Coating mode: dripping mode/anilox coating